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Abnormal bonding pads have often been formed through a series of wafer processing steps, which may cause a variety of failure modes in the efficient operation of the end products. In this work, the effect of fluorine-outgassing on its formation as a case study has been studied. We analyzed abnormal bonding pads prepared by various defective conditions and investigated causes of defect that boosts...
Abnormal bonding pads have often been formed through a series of wafer processing steps, which may cause a variety of failure modes in the efficient operation of the end products. In this work, the effect of fluorine-outgassing on its formation as a case study has been studied. We analyzed abnormal bonding pads prepared by various defective conditions and investigated causes of defect that boosts...
A laser ablation-molecular beam/reflectron time-of-flight mass spectrometric technique was used to investigate the ion-molecule reactions that proceed within Ti + (ROH) n (R=C 2 H 5 , (CH 3 ) 3 C) heterocluster ions. The mass spectra exhibit a major sequence of cluster ions with the formula Ti + (OR) m (ROH) n (m=1-3); these cluster...
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