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This paper reports the design and fabrication of dynamic ultra-miniature pressure sensor. Based on bulk silicon MEMS micromachining technology, the Si-Si direct vacuum bonding and thinning technology with precision control were used to fabricate the subminiature silicon piezoresistive chip for absolute pressure measurement. The sensors with outer diameter Φ2.0mm were packaged with miniature probe...
An optical micro-electro-mechanical-system pressure sensor based on light intensity modulation is described. The idea is to use light for signal transmission to replace electrical signal, which isolates the sensor from electrical signals, so that it is quite suitable in flammable and combustible areas such as petrochemical and oil well. The sensor is composed of silicon diaphragm and optical system...
This paper aims to examine the feasibility of a novel resonant pressure sensor, which is realized by introducing a double-ended tuning fork (DETF) quartz resonator into a silicon substrate. Theoretical model and finite element simulation results are given to provide support for the scheme. Sensor prototypes are fabricated based on micromachining technologies. Experimental setup for testing is established...
This paper presents a novel approach for ultra-low pressure detection using a capacitive micromachined ultrasonic transducer (CMUT) as the sensing element. The working principle depends on the resonant frequency shift of the CMUT under the measured pressure. The finite element method (FEM) simulations were employed to study the sensing performance of the CMUT. The results demonstrated the feasibility...
We present a temperature compensation system for silicon piezoresistive pressure sensor based on neural network. This system can be used for measuring the pressure of various media. And the design can simplify the implementing hardware of pressure measurement system. Compared with traditional design, it can output three signals: current signal, digital signal based on RS485 and Zigbee wireless signal,...
The paper presents a piezoresistive absolute micro-pressure sensor for altimetry. This investigation includes the design, fabrication and testing of the sensor. An improved structure is studied through incorporating sensitive beams into the bossed-diaphragm structure. By analyzing the stress distribution of sensitive elements using finite element method (FEM), the configuration shows an enhanced sensitivity...
Presented is a piezoresistive absolute micro-pressure sensor, which features relatively high sensitivity and overload resistance simultaneously. In this investigation, the design, fabrication and testing of the sensor are carried out. By analyzing the stress distribution on sensitive elements using the finite-element method (FEM), an improved structure through introduction of sensitive beams and islands...
In order to solve the pressure measurement problem in the harsh environment, such as high temperature above 200degC, a special piezoresistive pressure sensor chip has been developed. Based on the MEMS (micro electro-mechanical system) and SIMOX (separation by implantation of oxygen) technology, the piezoresistive pressure sensor chip was constituted by silicon substrate, a thin buried silicon dioxide...
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