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We present a micro resonant acceleration sensor based on the frequency shift of quartz double ended tuning fork (DETF). The two stiff ends of DETF are mounted on proof mass and temperature isolator structure of silicon support, respectively. Electrodes are coated on the four surfaces of the resonant beam to excite anti-phase vibration model to balance inner stress and torque. Stress in DETF beam shifts...
This paper aims to examine the feasibility of a novel resonant pressure sensor, which is realized by introducing a double-ended tuning fork (DETF) quartz resonator into a silicon substrate. Theoretical model and finite element simulation results are given to provide support for the scheme. Sensor prototypes are fabricated based on micromachining technologies. Experimental setup for testing is established...
The paper presents a piezoresistive absolute micro-pressure sensor for altimetry. This investigation includes the design, fabrication and testing of the sensor. An improved structure is studied through incorporating sensitive beams into the bossed-diaphragm structure. By analyzing the stress distribution of sensitive elements using finite element method (FEM), the configuration shows an enhanced sensitivity...
Presented is a piezoresistive absolute micro-pressure sensor, which features relatively high sensitivity and overload resistance simultaneously. In this investigation, the design, fabrication and testing of the sensor are carried out. By analyzing the stress distribution on sensitive elements using the finite-element method (FEM), an improved structure through introduction of sensitive beams and islands...
A piezoresistive force transmitter has been developed for gauging the variation of yarn's linear density with the measuring range of 0–5 N and the corresponding voltage output of 0– 5 V. The transmitter simply consists of a force sensor head and a signal processing circuit unit. The sensor head consists of a sensitive silicon chip and an elastic metal element. The chip is based on piezoresistive...
A kind of micro piezoresistive pressure sensor with stable performances under high temperature is designed based on the silicon on insulator (SOI). Through analyzing the stress distribution of diaphragm by finite element method (FEM), the model of structure was established. The fabrication operated on SOI wafer, which can be used in extreme high temperature environments, and applied the technology...
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