The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
The dynamical behavior of methylchloride (CH 3 Cl), which has a possibility of an important precursor in the atomic-order etching of III–V compounds, was studied on a GaAs(001)−2×4 surface using a supersonic molecular beam. When the surface temperature was below 570K, the incident CH 3 Cl molecule had two kinds of reaction channels. The one was a trapping/desorption channel, where...