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In2O3 and Fe-doped In2O3 nanowires (NWs) were prepared on a Si substrate by using the CVD method. Structure analysis showed that the preparation of Fe-doped In2O3 NWs formed the body-centered cubic structure, which is nearly consistent with that of the In2O3. Importantly, the characteristic peak at (222) and (400) of Fe-doped In2O3 shifted to high angle, owing to the ionic radii of Fe3+ ions (0.79 Å)...