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The design, fabrication, and characterization of surface relief Bragg gratings integrated with aluminum oxide ridge waveguides are reported. After patterning a photoresist layer by laser interference lithography, uniform gratings with a depth of ∼120nm and a period of 507nm were etched into the SiO 2 top cladding. The grating length varied between 1.25mm and 4.75mm. The grating-induced loss...
The variety of integrated optical devices which have recently been demonstrated in the aluminum oxide (Al2O3) waveguide platform is evidence of the favourable optical properties of this material [1–3]. The wafer-scale fabrication process and its compatibility with existing silicon waveguide technology further emphasize the significance of this material [4]. The ability to integrate Bragg grating structures...
The favourable optical properties of aluminium oxide (Al2O3) waveguides make it an excellent laser gain medium for monolithic laser devices. Recently, low-loss erbium-doped aluminium oxide (Al2O3:Er3+) channel waveguide amplifiers have demonstrated internal net gain over a wavelength range of 80 nm (1500–1580 nm), with a peak gain of 2.0 dB/cm at 1533 nm [1]. Consequently, the first integrated Al2...
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