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The purging of stagnant or dead volumes in gas distribution systems is an important method for removing impurities and maintaining cleanliness. A combination of experimental investigation and computational process modeling is used to study the dynamics of impurity removal under variety of purge conditions. The controlled cycling of pressure during purge is found to enhance the cleaning process significantly,...
The existence of trace amounts of moisture in process gases could adversely affect the fabrication of semiconductor devices. One important and practical challenge in transporting ultra-high-purity (UHP) gases from the point-of-storage (POS) to the point-of-use (POU) is the susceptibility of the gas distribution systems to molecular contaminants, especially moisture. In modern micro/nanoelectronic...
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