Search results for: C. Waldfried

Items from 1 to 12 out of 12 results

chapter

Effects of resist strip and clean on USJ performance

I.L. Berry, C. Waldfried, K. Han, S. Luo, more

Extended Abstracts - 2008 8th International Workshop on Junction Technology (IWJT '8) > 87 - 92

2008 8th International Workshop on Junction Technology (IWJT '08)

As junction depths decrease below 50 Aring, surface conditions before, during and after implantation have an increasing impact on the characteristics of the junction. Understanding the effects of photoresist strip and clean on the junction characteristics after annealing are critical to achieve expected and consistent device performance. Photoresist strip and clean is found to cause: junction etching,...

article

Thermal furnace and Ultraviolet assisted curing impact on SiOCH spin-on ultra low dielectric constant materials

A. Zenasni, B. Remiat, C. Waldfried, Ch. Le Cornec, more

Thin Solid Films > 2008 > 516 > 6 > 1097-1103

In recent years, the continuous progression of ultra-large scale integration has driven the emergence of technological solutions. In particular, major challenges have been faced for the fabrication of interconnect structures, where ultra low dielectric constants are required to decrease the parasitic capacitances between metal lines. Porous material, obtained using the porogen approach, is the main...

article

Thermomechanical properties of thin organosilicate glass films treated with ultraviolet-assisted cure

F. Iacopi, G. Beyer, Y. Travaly, C. Waldfried, more

Acta Materialia > 2007 > 55 > 4 > 1407-1414

Ultraviolet (UV)-assisted cure has recently been reported as an efficient method to enhance the mechanical properties of organosilicate glasses (OSG) at the expense of only minor film densification. In this work we show that, depending on the OSG material, the effect of UV-cure on fracture and thermal conductivity properties can vary to a large extent even though the same extent of stiffness enhancement...

article

The effective spin dependent Debye temperature of Gd(0001)

Hae-Kyung Jeong, R. Skomski, C. Waldfried, Takashi Komesu, more

Physics Letters A > 2004 > 324 > 2-3 > 242-246

The collective vibrational motions along the surface normal direction of the expansively strained Gd(0001) surface has been investigated. The effective Debye temperature, indicative of the dynamic motion of lattice normal to the surface, is 137+/-35 K from X-ray photoemission. With angle-resolved spin polarized photoemission spectroscopy, the Debye temperature is determined to be 79+/-35 K in spin...

article

Variations of the wave vector dependent band gaps with structural transformations of Gd thin films

I.N. Yakovkin, C. Waldfried, Takashi Komesu, P.A. Dowben

Physics Letters A > 2002 > 304 > 1-2 > 43-48

Thin Gd films, of only several monolayers, form a rectangular structure on Mo(112) surface. At higher coverages on Mo(112), the Gd overlayer adopts a hexagonal packing, consistent with that expected of the hcp crystal structure of Gd(0001). The band symmetries for these Gd surfaces are found to differ substantially with structure, based both on angle resolved photoemission studies and band structure...

chapter

Ultra low-k porous silicon dioxide films from a plasma process

Qingyan Han, Wei Chen, C. Waldfried, O. Escorcia, more

Proceedings of the IEEE 2001 International Interconnect Technology Conference (Cat. No.1EX461) > 171 - 173

Proceedings of the IEEE 2001 International Interconnect Technology Conference

Ultra low dielectric constant porous silicon dioxide films were obtained through a plasma curing process. The process developed was based on a hydrogen silsesquioxane (HSQ) spin-on process with induction of porosity. The dielectric constants of plasma cured films are in a range of 2.0-2.2. The Young's modulus values of the porous silicon dioxide films are between 5.7 and 9.0 GPa. The plasma cured...

article

The interplay between the surface band structure and possible surface reconstructions of Mo(112)

T. McAvoy, J. Zhang, C. Waldfried, D.N. McIlroy, more

The European Physical Journal B > 2000 > 14 > 4 > 747-755

Abstract: The experimental band structure of Mo(112) and the effects by temperature and adsorbate are presented. A surface resonance, identified as crossing the Fermi level at about 1/3 from to of surface Brillouin zone, was observed to be very sensitive to both contamination and temperature. We find evidence of adsorbate and temperature induced reconstruction of the Mo(112) surface. Examination...

article

The interplay between the surface band structure and possible surface reconstructions of Mo(112)

T. McAvoy, J. Zhang, C. Waldfried, D.N. McIlroy, more

The European Physical Journal B > 2000 > 14 > 4 > 747-755

The experimental band structure of Mo(112) and the effects by temperature and adsorbate are presented. A surface resonance, identified as crossing the Fermi level at about 1/3 from to of surface Brillouin zone, was observed to be very sensitive to both contamination and temperature. We find evidence of adsorbate and temperature induced reconstruction of the Mo(112) surface. Examination of low-energy...

article

The occupied and unoccupied electronic structure of adsorbed ferrocene

P.A. Dowben, C. Waldfried, Takashi Komesu, D. Welipitiya, more

Chemical Physics Letters > 1998 > 283 > 1-2 > 44-50

We have studied both the occupied and unoccupied molecular orbitals of adsorbed ferrocene. The occupied molecular orbitals have been identified using a combination of photoemission selection rules and resonant photoemission. Ferrocene adsorbs with a strong preferential molecular orientation on Mo(112) at 150 K, like metallocenes on many other surfaces. Though the ferrocene molecular axis is largely...

article

The adsorption of nickelocene Part 1: molecular bonding on Ag(100)

D. Welipitiya, C.N. Borca, C. Waldfried, C. Hutchings, more

Surface Science > 1997 > 393 > 1-3 > 34-46

The molecular adsorption and desorption of nickelocene, Ni(C ₅ H ₅ ) ₂ , on Ag(100) have been studied by both angle-resolved photoemission and thermal desorption. Photoemission results indicate that the initially adsorbed surface species closely resemble that of molecular nickelocene. The molecular axis is not along the surface normal, as determined by angle-resolved photoemission...

article

The nonmetal to metal transition with alkali doping of films of molecular icosahedra

D.N. McIlroy, C. Waldfried, T. McAvoy, Choi Jaewu, more

Chemical Physics Letters > 1997 > 264 > 1-2 > 168-173

Using photoemission, inverse photoemission, and electron energy loss spectroscopy, we have probed the changes in the electronic structure of molecularly adsorbed closo-1,2-dicarbadodecaborane (closo-C ₂ B ₁ ₀ H ₁ ₂ or orthocarborane) films as a function of Na doping. The insulator gap of this film of molecular icosahedra closes with Na doping and both new occupied...

article

Determination of the surface Debye temperature of Mo(112) using valence band photoemission

E.W. Plummer, C. Waldfried, D.N. McIlroy, J. Zhang, more

Surface Science > 1996 > 363 > 1-3 > 296-302

The temperature dependence of the valence-band emission from the (112) surface of molybdenum has been studied with ultraviolet photoemission spectroscopy. Valence-band features arising from the bulk and surface states exhibit different temperature dependences. The results can be explained in terms of bulk and surface vibrational disorder. A surface (bulk) Debye temperature of 313 K (422 K) is extracted...

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