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This paper presents a MEMS type shape memory alloy (SMA) thick film actuator array for a tactile display which renders texture to human finger skin by mechanical stimulations. We propose a planar tactile display combined with SMA thick film actuator array (5 × 5 array, 1 mm pitch). The deflectable planar spring-shaped SMA actuators with micro-heater circuits were batch-fabricated from a 10-µm thick...
In this study, we purpose a centrifuge-based dynamic microarray system (CDM) for trapping micro-sized samples sequentially from only 10 μl of the samples. Our system enables us to make an array of microbeads only with a spin-coater. The air can be introduced to the microchannel to isolate and encapsulate the trapped beads by the specific speed rotation because the microbeads were fixed at the outlet...
We present a simple fabrication method based on nano-molding and capillary force lithography to achieve micro/nano structures of poly-acrylamide (PAAm) hydrogel. We fabricated various patterns, such as line and space (L&S), posts, and grid with 140-2,000 nm in width or diameter using nano-molding method. Also, we could fabricate fiber and mesh structures of 2 μm in width using capillary force...
We propose a method for attaching flagella to a selected region of a micro-object. We separated the flagella of unicellular algae Chlamydomonas from their body and reactivate them by adding adenosine triphosphate (ATP). We fixed them on a specific region of micro-scale beads using a device that has a perforated Parylene sheet separating a flagella solution from a no-flagella one. We have succeeded...
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