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This paper presents a MEMS type shape memory alloy (SMA) thick film actuator array for a tactile display which renders texture to human finger skin by mechanical stimulations. We propose a planar tactile display combined with SMA thick film actuator array (5 × 5 array, 1 mm pitch). The deflectable planar spring-shaped SMA actuators with micro-heater circuits were batch-fabricated from a 10-µm thick...