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A tunable surface plasmon resonance (SPR) structure driven by microelectromechanical system (MEMS) is proposed and analyzed in this work. The MEMS isotropically expands the suspended SPR structures of nanometer metal disks scattered on a polydimethylsiloxane (PDMS) diaphragm, to different extents on the xy-plane; filtering the incident white light into various colors under control of applied voltage...
In this work, we proposed a hybrid PDMS-silicon electrostatic actuator with a large stroke under low driving voltages. The device features a staggered vertical comb-drive suspended by PDMS springs. Because of the flexibility of PDMS, an initial staggered displacement was naturally formed due to the self-weight of the device. Experimental results showed that the combination of polymeric springs and...
Study on using a process which was combined LIGA (Lithographie Galvanoformung Abformung) with etching to manufacture an optical film of an aspherical microlens array (A-MLA), which can improve the extraction efficiency of an OLED (Organic Light-Emitting Diode). The extraction efficiency of a current OLED is not high due to its total internal reflection, and the luminance is also lower because of the...
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