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We introduced high-temperature steam annealing (HSA) as a low-cost and effective post-annealing method for c-Si solar cell processing. The annealing effects were analyzed by measuring effective lifetime and C-V characteristics and were compared with the effects of forming gas annealing (FGA) and hydrogen-radical annealing (HRA). By using this method, effective lifetime of a SiO 2 -coated wafer...