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A resonant electrostatic charge sensor with high sensitivity based on micro electromechanical system technology is proposed to measure electric charge. During measurement, input charge produces lateral electrostatic force to change effective stiffness of double-ended tuning forks resonator, and lead to a resonant frequency shift. The charge sensing functionality is experimentally verified and the...
A micromachined resonant electrostatic charge sensor with enhanced responsivity by introducing dual single-stage micro-leverage mechanisms is presented. The sensor is based on the detection of resonant frequency shift of a single-crystal silicon double-ended tuning fork (DETF) element due to the axial compressive generated by the additional charge and transformed by the micro-levers. An analytic model...
A two-axis in-plane capacitive accelerometer fabricated on silicon-on-insulator (SOI) is developed. With each stationary electrode separated to two sub stationary electrodes by refilled isolation trench, the presented accelerometer has compact differential capacitance electrodes to improve capacitance sensitivity per sensing area. In addition, the overlap area-changed capacitor enables good linearity...
This paper presents a comparison of the energy harvesting capabilities of 3 different electrostatic mechanisms based on MEMS (microelectromechanical system) structures which are designed and operated in idea vacuum. The 3 mechanisms that will be compared are the in-plane overlap, in-plane gap closing and out-of-plane gap closing mechanisms. Firstly, it was found that the in-plane gap closing mechanism...
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