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This paper presents the optimization design of 3D integrated inductors exploiting through silicon vias (TSV) technology to improve the quality (Q) factor in the 2–20 GHz range. The embedded inductor allows the heterogeneous integration with CMOS and MEMS components in a size-compact and low-cost manufacturing process. Results limited to our manufacturing possibilities (5.5×15 µ m-area tungsten TSVs,...
This paper presents the optimization design of 3D integrated inductors exploiting through silicon vias (TSV) technology to improve the quality (Q) factor in the 2–20 GHz range. The embedded inductor allows the heterogeneous integration with CMOS and MEMS components in a size-compact and low-cost manufacturing process. Results limited to our manufacturing possibilities (5.5×15 µ m-area tungsten TSVs,...
We report, for the first time, self-assembled cantilever and clamped-clamped tri-state carbon nanotube (T-CNT) nano-electro-mechanical (NEM) switches with sub-100 nm air-gap dual lateral gates. Unlike conventional bi-state CNT switches, the T-CNT NEM switches operate in three states: CNT in the center (OFF), CNT attracted to the left gate (ON-1) or to the right gate (ON-2). They demonstrate excellent...
Solar cells embedded in the SOI substrate were successfully used as the sole energy source to power a ring oscillator fabricated using an ultra-low-power fully depleted SOI process on the same wafer. The speed of the ring oscillator increased with increasing light intensity and showed a fastest oscillation with a 4.5 ns stage delay and 0.26 fJ power-delay product. The maximum power generated by the...
A workfunction-tuned TiN metal gate is integrated into ultra-low-power FDSOI CMOS transistors, optimized for subthreshold operation at 0.3 V. The workfunction of the TiN metal gate is tunable across the mid-gap range, by adjusting deposition parameters and post-deposition annealing. The transistors show 71% reduction in Cgd and 55% reduction in Vt variation, compared to conventional FDSOI transistors...
A synchronization is a mechanism allowing two or more processes to perform actions at the same time. We study the expressive power of synchronizations gathering more and more processes simultaneously. We demonstrate the non-existence of a uniform, fully distributed translation of Milner's CCS with synchronizations of n + 1 processes into CCS with synchronizations of n processes that retains a "reasonable''...
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