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This paper reports a novel Center Support Quadruple Mass Gyroscope (CSQMG), which combines the advantages of tuning fork gyros (TFGs, large mass and high resolution) and the micro hemisphere resonant gyros (MHRGs, fully symmetric and high Q), and is expected to achieve performance breakthrough of flat structures. The operation of the CSQMG is based on four proof masses symmetric distributed circumferentially,...
This paper reports a MEMS resonator with closed-loop vibration control which can be parametric driven at ambient pressure. Non-interdigitated comb fingers are used as parametric force electrodes and optimized design enables the electrodes to generate large electrostatic stiffness, which makes parametric drive possibly realized at ambient pressure and low Q-factor (65.8). Closed-loop vibration control...
This paper presents the design and performance of a capacitive sensor interface dedicated to a microelectromechanical systems (MEMS) micromotor electrically levitated in five DOFs. The position and orientation of the rotor are detected by measuring differential rotor-electrode capacitances with a set of capacitance-to-voltage converters (CVCs). The sensor contains multiplexed electrodes for both capacitive...
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