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The article is aimed at developing innovative primary transducer nanoscale material for semi-conductor sensors and investigating their surface physicochemical properties. Zink selenide nanofilms were obtained by discrete thermal evaporation in vacuum. Adsorption properties of the given material for carbon oxide (II) and oxygen were studied by the piezoquartz microweighing. Zink selenide nanofilms...
Three types of array from resistive sensors based on polymer composites with carbon filler, tin oxide and thermo-catalytic sensors were compared. Special attention was given to ways of expanding gas analysis systems by using hybrid sensor arrays and kinetic parameter of sensory response.
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