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We propose and demonstrate a cascaded-cavities Fabry-Perot interferometer (FPI) for simultaneous measurement of pressure and temperature based on photonic crystal fiber. The sensor is composed of cascaded air-cavity and silica-cavity. The air-cavity and silica-cavity are both sensitive to temperature and pressure because of the thermo-optic coefficient and Young's modulus. We can obtain the pressure...
We report a significant step in the design, fabrication, and performance evaluation of a 240 240 microelectromechanical system uncooled infrared (IR) focal plane array (FPA) with 42- pitch pixels. An improved analytical model has been developed to optimize the design. The optimal key parameters have been verified through experiments, including thermal transmission efficiency, thermomechanical...
This paper deduces a remarkably precise analytical formula for calculating the fundamental resonant frequency of V-shaped cantilevers using Rayleigh-Ritz method. This analytical formula, which is very convenient for MEMS sensor design, is then validated by ANSYS simulation. This formula raises a new perspective that, among all the V-shaped cantilevers, the simplest triangular cantilever can lead to...
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