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ZnO is used as a transparent conducting oxide (TCO) for the front electrode in silicon thin film solar cells because of its low resistivity and high optical transmittance. Hydrogenated Al-doped zinc oxide (AZO:H) thin films were grown on glass by rf magnetron sputtering using a ceramic target (98 wt. % ZnO, 2 wt.% Al2O3) in H2/Ar ambient. We changed the ratio of H2/(Ar+H2) and the substrate temperature...
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