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In this paper ZnO films are grown on GaAs/Al 2 O 3 substrates at different temperature by metal-organic chemical vapor deposition (MOCVD). The GaAs/Al 2 O 3 substrates are formed by depositing GaAs layer (∼35nm) on the Al 2 O 3 substrate. The results of X-ray photoelectron spectroscopy (XPS) and X-ray diffraction (XRD) demonstrate that most of the Ga...