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Actuation of thermal bimorph-based electrothermal micromirrors by pulse width modulated (PWM) voltage is reported. PWM actuation provides more flexibility over continuous voltage waveforms especially in the case of micromirror arrays.
With their large scan range and low drive voltages, electrothermally-actuated micromirrors have great potential in optical biomedical imaging applications, but the repeatability and reliability of such micromirrors are not well understood. This paper reports the conditions for achieving repeatability of the embedded resistive heater and the mirror tilt angle of an electrothermal bimorph micromirror...
An electrothermal micromirror with an aperture size of 1 mm times 1.2 mm has been developed. The mirror can tilt as much as 21deg with a 15 V DC voltage. High linear scanning efficiency is obtained by using a special drive voltage waveform. The waveform is characterized by two parameters which are determined experimentally.
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