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A novel cantilever array sensor was micro-fabricated for precise bio-marker detection. The device was fabricated on a SOI wafer with CMOS compatible processes. In order to reducing the effect of k variation due to adsorption, a local biochemical reaction cavity was designed in the free end of the cantilever, the antibody-immobilization was performed in this local area by micro printing technology...
Processes that define the cantilever sensor from the front side of the wafer are designed to release the stress of the buried oxide layer and top silicon layer. This approach can be applied to enhance the performance of all the cantilever-based sensors. Then, a novel cantilever array sensor was micro-fabricated for precise bio-marker detection.
Processes that define the cantilever sensor from the front side of the wafer are designed to release the stress of the buried oxide layer and top silicon layer. This approach can be applied to enhance the performance of all the cantilever-based sensors. Then, a novel cantilever array sensor was microfabricated for precise bio-marker detection.
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