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The 4 GHz film resontors have been fabricated by sputtered Pb(Mn,Nb)O3-Pb(Zr,Ti)O3 (PMnN-PZT) thin films. The PMnN-PZT thin films were deposited on (100)MgO substrates. The thin films showed tetragonal crystal structure and highly (001) orientation. The film bulk acoustic resonators (FBAR) composed by PMnN-PZT thin films were fabricated by MEMS technology. RF properties of the resonator were evaluated...
The 4 GHz bulk acoustic wave (BAW) resonators have been fabricated by thin films of Pb(Zr,Ti)O3 based ternary perovskite compounds. The Pb(Mn1/3Nb2/3)O3-Pb(Zr,Ti)O3 (PMnN-PZT) thin films were deposited on (100)MgO substrates by RF magnetron sputtering. The PMnN-PZT thin films showed tetragonal crystal structure and highly (001) orientation. The surface roughness of the thin films was about 2 nm. The...
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