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We fabricated a carbon nanotube based gas sensor for the detection of CO and NH3 mixed gas. Conventional photolithography technology was applied for the localization of sensing materials and the sensor fabrication. Single walled carbon nanotubes were dispersed in Sodium Dodecyl Sulfate (SDS) solution. The whole surface was covered by a photoresist except window areas between two electrodes. Carbon...
Measurements of the variation of vacuum level inside of field emission device when electron is emitted from carbon nanotubes (CNT) by electric field were performed. Multi-walled carbon nanotubes (MWCNT) sensor packaged with a vacuum device is used to measure the degree of a vacuum until the end of the vacuum device life. It was found that the electrical properties of MWCNTs altered with the degree...
We developed a chemical gas sensor using SWCNT (single-walled carbon nanotubes) with nanoscale electrode-interval. To fabricate electrode pattern, we designed at first a continuous electrode pattern without any intervals. Then, the nanoscale interval was formed by a nanoscale trench using a sacrificial oxide layer located at the center of electrode. By this technique we obtained an electrode pattern...
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