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An electrically tunable band-pass filter based on engineered substrate with patterned Permalloy (Py) thin film has been designed and characterized. The band-pass filter is designed with metamaterial resonators to achive a compact size; the designed filter is fabricated on a multi-layered engineered substrate which composes a layer of liquid crystal polymer, a layer of patterned Py thin film, and silicon...
With the wide use of electromagnetic devices in GHz frequency band, the exploration of microwave soft magnetic materials with high permeability at GHz band has attracted much attention [1]. The previous studies have demonstrated that the good microwave magnetic properties can be achieved for the soft magnetic materials with easy-plane anisotropy, and the product of initial permeability and natural...
Capacitive micromachined ultrasonic transducers (CMUTs) have prospective clinical applications in ultrasound diagnostics and therapy. We have modeled, fabricated, and characterized CMUT arrays suitable for intravascular and gastrointestinal use. The elements of the CMUT arrays are connected from the back side of the array by through-silicon-vias (TSVs) with a pitch of 25 μm. In the reported work,...
Protective coatings can replace traditional packaging methods, which are often voluminous and may spoil the otherwise excellent opportunity for miniaturized implantable medical MEMS. The bio-growth on a selection of biocompatible protective coatings (TiO2, DLC and Parylene) was investigated. The model system for evaluation was a diaphragm based acoustic resonator primary designed for fish identification...
We have demonstrated high Q measurements in a room temperature Miniature Sapphire Acoustic Resonator (MSAR). Initial measurements of bulk acoustic modes in room temperature sapphire at 39 MHz have demonstrated a Q of 8.8×106. The long term goal of this work is to integrate such a high Q resonator with small, low noise quartz oscillator electronics, providing a fractional frequency stability better...
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