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This paper reports on development of AFM-like active CMOS-MEMS conductive probes and arrays. The active probes are aimed for scanning tunneling microscopy (STM) imaging and field-emission (FE) assisted nanostructure formation. Two kinds of STM tip approaches compatible with CMOS-MEMS process — Electron-Induced Beam Deposition (EBID) and Spindt tip method — are presented, and their functionality is...
Due to force scaling laws, adhesion forces at the micro scale make rapid, accurate release of micro objects a challenge in pick-place micromanipulation. This paper presents a new MEMS microgripper integrated with a plunging mechanism to impact the micro object for it to gain sufficient momentum to overcome adhesion forces. The performance was experimentally quantified through the manipulation of 7...
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