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This paper reports a novel bi-directional electrothermal MEMS mirror with its mirror plate's position insensitive to ambient temperature and stable over time. In contrast, the electrothermal MEMS mirrors demonstrated previously are unidirectional and the position of the mirror plate changes significantly with ambient temperature and drifts over time. The new MEMS mirror design has been fabricated...
We demonstrated a MEMS based Monolithic Michelson interferometer with both the movable mirror and fixed mirror vertically oriented and integrated on a silicon bench for the first time. Both mirrors are single-crystal silicon based and their vertical orientation is attained by a proper thermal bimorph design and a unique stopper mechanism. This device enables miniature Fourier transform spectrometers.
This WeThis paper reports a MEMS-based Fourier transform spectrometer (FTS) with small size, high resolution, fast sampling and low cost. The MEMS scanning mirror can generate over 300 μm piston motion at 10 Hz with only 7Vpp and maintain a very small tilting less than 0.03°. This high scanning performance is achieved by an innovative three-level ladder actuator design and a unique placement of sixteen...
Graphene is a typical two-dimensional material which has fascinating electrical, mechanical, and optical properties. In particular, graphene-based smart MEMS/NEMS devices can automatically respond to external electric stimulation and convert to mechanical movement. Actuator is one of the most potential applications of graphene-based MEMS. However, its reliability investigation has rarely been reported...
This work presents Si-based electromechanical resonators fabricated at the transistor level of a standard SOI CMOS technology and realized without the need for any post-processing or packaging. These so-called Resonant Body Transistors (RBTs) are driven capacitively and sensed by piezoresistively modulating the drain current of a Field Effect Transistor (FET). First generation devices operating at...
A CMOS control circuit capable of closed-loop capacitance sensing and control of RF MEMS switches was designed, fabricated, and tested. The control was based on fine-tuning the magnitude of the bias voltage of the switches according to the difference between sensed and targeted capacitances. Intelligence could be programmed by periodically alternating the sign of the bias voltage when its magnitude...
Modifications to a standard capacitive MEMS switch process have been made to allow the incorporation of ultra-nano-crystalline diamond as the switch dielectric. The impact on electromechanical performance is minimal. However, these devices exhibit uniquely different charging characteristics, with charging and discharging time constants 5-6 orders of magnitude quicker than conventional materials. This...
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