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The continued scaling of devices in accordance with Moore's law requires activation of some implants such as the source-drain extensions, SDEs, with as little diffusion as possible. New options in thermal processing are described and compared. Thermal flux annealing is the regime where power density is high enough to cause local heating but not so high as to eliminate heat transfer entirely. If energy...
Minority carrier lifetime is an efficient indicator of defect levels present in the starting material as well as process and equipment induced defects. By employing rapid thermal processing (RTP) and rapid photothermal processing (RPP) as the thermal processing techniques, we have studied the effect of ultraviolet (UV) and vacuum ultraviolet (VUV) photons on the bulk minority carrier lifetime of phosphorous...
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