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In this paper, high quality factor (Qair>18000), high frequency (~27 MHz and ~54 MHz), lateral-extensional mode film piezoelectric-on-silicon resonators are used as aerosol particle mass sensors. Using an aerosol particle generator, mass sensitivities of ~4.2 Hz/pg and ~42 Hz/pg are measured respectively which confirms the benefits of employing higher frequency resonators given the quality factor...
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