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Mechanical response of high-thermally-stable-grade parylene (diX-SR/HR) is investigated for flexible spring applications. Pendulum structures with a high-aspect-ratio beam are microfabricated using different parylene materials, and their amplitude and stress at resonant oscillation are measured. Based on fatigue tests and measurements of the temperature coefficient of Young's modulus, MEMS structures...
We developed a tensional force sensor by applying artificial tetrafluoroethylene-perfluoroalkylvinyl ether copolymer (PFA) hollow fibers. The fibers were fabricated by depositing thin metal and an insulation layer on the PFA tube, and the fabric sensor was made by weaving the decorated PFA tube and the conventional cotton yarns together. The sensor was 57.0 times 4.0 mm. The sensor output linearly...
A vibration-driven electret generator has been developed for energy harvesting applications. Perfluorinated polymer electret with extremely-high surface charge density is employed for large power output. By using parylene as the spring material, a low-resonant-frequency MEMS generator is realized. Large in-plane amplitude of 0.8 mm at the resonant frequency as low as 37 Hz has been achieved. With...
An aged silicone polymer insulator, which had been used at testing station near sea coast for approx. 10 years, was investigated. The aging mode was different from erosion. It was confirmed that the rubber aging phenomena was similar to damage due to nitric acid by FT-IR analysis. It is deemed that the acid was generated during corona discharge on rubber housing. In order to avoid such a rubber aging,...
Vibration-driven electret generator has been developed with the aid of MEMS technologies. Parylene high-aspect-ratio spring is successfully microfabricated to support an in-plane seismic mass. Resonant frequency as low as 37Hz has been achieved with a large in-plane amplitude of 1 mm. With our early prototype, we have obtained 21 Vp-p voltage output.
Recently, micro power generation using electret-based electrostatic induction attracts much attention due to its large power output at low frequency range. Since theoretical power output is proportional to the square of the surface charge density of electret, development of high-performance electret is required. Boland et al. employed Teflon reg AF (Du Pont) as their electret film. We previously found...
We propose a passive gap-spacing control method in order to avoid stiction between top and bottom structures for in-plane sensor/actuator applications. Patterned electret using a high-performance perfluoro polymer material is employed to induce repulsive electrostatic force. Out-of-plane repulsive force is successfully demonstrated with our early prototype both in air and liquid.
We report the development of a micro cell sorter for extraction of rare cells from a limited amount of sample. The separation principle is based on specific adhesion with the aid of surface-immobilized antibodies. Antibody-immobilized channel walls are fabricated with a versatile technique using functionalized parylene. Performance of the cell sorter is characterized through cell velocity measurements,...
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