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This paper presents a chemical microsystem based on the integration of a silicon-based resonant microsensor and a CMOS ASIC for portable sensing applications in air. Two types of resonant microstructures are used as mass-sensitive microsensors: cantilever-based and disk-shape microresonators. Based on the characteristics of the microsensors, CMOS-integrated interface and control electronics have been...
This paper presents a chemical microsystem based on the integration of a silicon-based resonant microsensor and a CMOS ASIC for portable sensing applications in air. Cantilever-based microresonators coated with chemically-sensitive polymer films are used as microsensors. The CMOS ASIC utilizes the self-oscillation method, which uses an amplifying feedback loop. For improved short- and long-term frequency...
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