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We have succeeded in enhancing the piezoelectric property of lead zirconate titanate (PZT) thin films by employing “pulse poling” technique. We have fabricated MEMS-based microcantilevers using Pb(Zr0.52,Ti0.48)O3 (MPB-PZT) thin films. By applying 1 kHz and 100 V of unipolar triangle pulse voltage, the transverse piezoelectric constant −d31 of the PZT thin film has been enhanced as high as 105 pm/V,...
We report development of a label-free adhesion-based cell sorter for early cancer detection. The sorting method is based on specific adhesion between target cells and antibody immobilized on oblique grooves of the channel wall. By optimizing the groove dimensions, lateral cell displacement twice as large as our earlier report has been obtained. Continuous lateral separation of HeLa cancer cells from...
A new label-free continuous cell sorting method has been developed for accurate extraction of rare cell. The sorting mechanism is based on antigen-antibody interaction and the secondary flow induced by oblique micro grooves on the channel surface. Specific adhesion between the cell membrane and the wall surface keep the target cells rolling on the wall, while the lateral flow along the groove induces...
Mechanical response of high-thermally-stable-grade parylene (diX-SR/HR) is investigated for flexible spring applications. Pendulum structures with a high-aspect-ratio beam are microfabricated using different parylene materials, and their amplitude and stress at resonant oscillation are measured. Based on fatigue tests and measurements of the temperature coefficient of Young's modulus, MEMS structures...
A novel low-voltage electrostatic droplet manipulation method, liquid dielectrophoresis on electret (L-DEPOE) is proposed. By using electret as a voltage source, a dielectric droplet can move between two electrodes by switching an external capacitor. A circuit model is developed to predict the electrostatic force acting on the droplet and the droplet motion. A prototype device has been microfabricated...
We report the development of a micro cell sorter for extraction of rare cells from a limited amount of sample. The separation principle is based on specific adhesion with the aid of surface-immobilized antibodies. Antibody-immobilized channel walls are fabricated with a versatile technique using functionalized parylene. Performance of the cell sorter is characterized through cell velocity measurements,...
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