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This WeThis paper reports a MEMS-based Fourier transform spectrometer (FTS) with small size, high resolution, fast sampling and low cost. The MEMS scanning mirror can generate over 300 μm piston motion at 10 Hz with only 7Vpp and maintain a very small tilting less than 0.03°. This high scanning performance is achieved by an innovative three-level ladder actuator design and a unique placement of sixteen...
This paper presents the design and experimental implementation of an adaptive sliding mode control scheme for a 2D MEMS micromirror with sidewall electrodes(SW), a closed-loop controlled 2D micromirror-based laser scanning microscope system is developed based on NI field-programmable gate array (FPGA) hardware, 2D image of the scanned target are obtained. Controller implementation, image acquisition...
This paper reports a miniature optical coherence tomography (OCT) probe and high-resolution 3D OCT imaging results obtained with this probe. The probe is only 2.8-mm in diameter, enabled by a unique high-fill-factor electrothermal MEMS mirror with hidden actuators and a novel wire-bonding-free (WBF) packaging technique. The MEMS mirror has a large mirror aperture of 1 mm with a chip size of only 1...
The stress relaxation behavior of copper thin films in electro-thermo-mechanical multiple fields has been studied by a developed wafer-curvature method. Experimental results reveal that the electromigration plays an important role in the relaxation process. At tensile stress state, coupled surface diffusion and grain boundary diffusion are the dominant mechanisms even at low temperature. In addition,...
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