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This paper presents a novel gas microvalve design in which a flow control gate is opened by the pneumatic pressure and closed by a SMA actuator, allowing large flow control. The microvalves were fabricated using a novel wafer-level Au-Si eutectic bonding process for TiNi to silicon integration. The resulting microvalves demonstrate a record pneumatic performance per footprint area; a microvalve of...
This paper presents the wafer-scale manufacturing of microactuators based on bulk shape memory alloy material integrated using adhesive bonding. The work addresses key technical challenges related to the wafer-scale fabrication of bulk SMA micro actuators, including wafer-scale integration of patterned SMA sheets to structured Si wafers and the integration of cold state reset layers to the microactuators...
This paper introduces the concept of batch microfabrication and electrical contacting of bulk SMA microactuators. This concept addresses technical solutions for the main challenges related to using SMA actuators such as the necessary mechanical bias force, the difficult electrical contacting and the high power needed for actuation. We report on initial SMA-dielectric-metal trimorph test structures...
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