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The “zero‐strain” Li4Ti5O12 is an attractive anode material for 3D solid‐state thin‐film batteries (TFB) to power upcoming autonomous sensor systems. Herein, Li4Ti5O12 thin films fabricated by atomic layer deposition (ALD) are electrochemically evaluated for the first time. The developed ALD process with a growth per cycle of 0.6 Å cycle−1 at 300 °C enables high‐quality and dense spinel films with...
Herein, growth kinetics, crystal structure, and the uniformity of titanium oxide (TiO2) thin films prepared using atomic layer deposition (ALD) and plasma‐enhanced ALD (PE‐ALD) are studied. TiO2 thin films are grown using titanium tetrachloride (TiCl4), water, and oxygen precursors. Using ALD, TiO2 is grown in the temperature range of 270–310 °C thermally and in the range of 300–400 °C with PE‐ALD...
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