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This paper describes the advancement of hot wire or hot filament CVD methods of diamond synthesis through the use high velocity gas flow activation by multiple collisions with a lengthy hot surface instead of activation by single collisions with hot wires. The possibility of synthesis of diamond crystals from a neutral gas with a high growth rate and a future solution of engineering scaling problems...
The study presents results on deposition of diamond structures from high‐velocity flows of carbon‐containing a gas mixture activated by hot surfaces. Important problems were solved by creation of the reactor using a spiral of heat‐resistant material, inserted into the chamber with an inlet nozzle. The possibilities of diamond synthesis in wide parameters ranges (pressure from 10−4 to 100 Torr, flow...
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