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This article describes a micromachined quartz tuning fork resonator, 6 mm in height by 2 mm in diamter, holding a two-terminal electronic component with a nomial frequency of 36 kHz (at zero degree) and 15 pF typical capacitance paked in a 90 Pa He gass sealed metal container, which has been used as a sensor for temperature measurement with good sensitivity, repeatability and reliability. The temperature...
In this paper, a highly sensitive temperature sensor based on quartz tuning fork resonators is reported. The temperature sensor is configured by ZY (110deg/10deg) Cut quartz crystal wafer based bulk acoustic wave (BAW) tuning fork resonators whose operating frequency is at 31 KHz. The ideal thermo-sensitive ZY cut for quartz tuning fork resonators is analyzed with the theory. The characterization...
A temperature sensing technique taking thermal sensitive quartz tuning fork vibration arm as sensitive components and output of digital frequency is presented. In the design of quartz tuning fork temperature sensor, selecting the cut type of quartz tuning fork according to the each anisotropic nature of quartz tuning fork, so that there is a linear relationship between quartz tuning fork frequency...
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