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Piezoresistive nanocantilevers are proposed for high-sensitive sensing applications such as thermal detectors, mass sensors, and magnetic resonance force microscopy. This paper describes the development of 100-nm-thick piezoresistive nanocantilevers and characterization of the temperature dependence of the piezoresisitivity and conductivity. The pieozresistive nanocantilevers are fabricated using...
A time-of-flight scanning force microscope (SFM) probe with an ability to switch the measurement mode using the electrostatically switching mechanism is designed, fabricated and demonstrated the performance of it. In order to achieve surface observation and chemical analysis simultaneously for imaging the chemical property of a material surface, this probe can switch the positions of the cantilever...
This paper provides details of the following two points: first, we introduce recent progress of the activities of IMEKO-TC3 and essence of the interesting topics on measurement of mass-related quantities presented in last meeting (IMEKO XVIII World Congress). Second, the basic concept of dynamic mass-measurement will be provided through a simple example. Moreover, some illustrative examples of the...
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