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Bismuth ferrite (BiFeO3) thin films with Bi2O3 buffer layers were prepared on Si/SiO2/TiO2/Pt substrates by sol–gel‐derived spin‐coating method. The structural and electrical properties of BiFeO3 was effectively improved by adding a Bi2O3 buffer layers either at Pt/BiFeO3 interface or on BiFeO3 surface, also strongly depending on the positions and the annealing conditions of buffer layers. A 500°C‐annealed...