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Piezoelectric micromachined ultrasonic transducer (pMUT) is a new approach to form high frequency arrays for real-time 3-D medical imaging. pMUT arrays based on SOI-Si bonding and PZT-coated membrane structures have been designed in this paper. After simulation, the 6×6 ultrasonic transducer array was fabricated and characterized. The total array area is approximately 2.0 mm by 2.0 mm. The micrograph...
The ultrasonic ranging system is widely used in automobiles, mobile robots, industrial control systems, etc. Ultrasonic transducer is the core component of car reversing aid system (CRAS). At present, Lead Zirconate Titanate (PZT) is generally used as piezoelectric material for ultrasonic transducer. In this paper, a method of successful use of Barium Titanate (BT) material in transducer application...
Micromachined technology has been widely used to reduce device size and improve performance. In this paper, our research activities on micromachined piezoelectric acoustic devices at wide frequency range, from audio microphones to ultrasonic transducers, are reviewed. These devices are based on ferroelectric thin films, and exceed the conventional acoustic devices in excellent performance, miniaturized...
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