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In this paper, the design, fabrication and initial characterization results of a bidirectional, vibration powered, bulk silicon-based electric energy generator are addressed. The converter is based on an In-Plane Overlap Plate (IPOP) configuration. Its mechanical design is inspired from 2D gyroscope. In most of real systems, the axis of the external vibrations is not known and if we assume that the...
This paper focuses on the design and fabrication issues of a silicon-based, vibration powered, electric energy generator. Its architecture is based on the parallel plate configuration. It uses electrostatic damping of variable MEMS capacitor as the energy converting mechanism. Variable capacitance is achieved by in-plane movement of the top electrode. Hence capacitance variation is achieved by means...
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