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In this paper, we report a Sigma-Delta MEMS navigation grade accelerometer, which, to our knowledge, is the first reported MEMS accelerometer to reach navigation grade performances. This reported system encompasses a high stability and high shock resistance mechanical MEMS sensor, a 5th-order sigma-delta closed-loop electronic with digital loop filtering and high stability voltage reference.
So far MEMS inertial accelerometers has struggled to reach tactical grade quality only and their bias stability and thermal drift are still obstacles to be overcome for inertial navigation systems. This paper reports on an ultrahigh precision MEMS closed-loop accelerometer recently developed by Colibrys, and the focus is on long term bias stability and thermal drift. The improvement in bias stability...
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