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This work is focused on design and fabrication of a four arms structure MEMS gripper integrated sidewall piezoresistive force sensor. Surface and bulk micromachining technology is employed to fabricate the microgripper from single crystal silicon wafer (i.e., no silicon on insulator wafer is used). Vertical sidewall surface piezoresistor etching technique is used to form the side direction force sensors...
This paper is focused on the design and fabrication of a four-arm-structure microelectromechanical systems gripper integrated with sidewall piezoresistive force sensors. Surface and bulk micromachining technologies are employed to fabricate the microgripper from a single-crystal silicon wafer (i.e., no silicon-on-insulator wafer is used). A vertical sidewall surface piezoresistor etching technique...
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