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This paper presents a novel fabrication process to realize high density silicon based quantum dot devices with close proximity Al and Si gates on ultrathin silicon-on-insulator for spin qubit applications. Al gates surrounding a Si nanowire channel can adjust tunnelling barrier height electrically, while Si plunger side gates enable precise control of the quantum dots potential. This device is fabricated...
This paper presents the realization of a FinFET double quantum dots transistor on ultrathin silicon-on-insulator. In this platform, three Al FinFET gates surround the Si device layer channel forming electrically tunable potential barriers; Si plunger side gates are included to enable precise control of the quantum dots potential. This device is fabricated using a multi-layer electron beam lithography...
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