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A thickness variation of only one Ångström makes a significant difference in the current through a tunnel junction due to the exponential thickness dependence of the current. It is thus important to achieve a uniform thickness along the barrier to enhance, for example, the sensitivity and speed of single electron transistors based on the tunnel junctions. Here, we have observed that grooves at Al...
We report on the fabrication of Josephson junction and superconducting bridges using a damascene CMP process applied for a first time to superconductors. The demonstrated industrial reliability of damascene CMP processes on large scale semiconductor circuits is a major incentive for our research that should allow large numbers of nanometric Josephson junctions to be fabricated in both Nb and Al, the...
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