The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
We report on the fabrication of Josephson junction and superconducting bridges using a damascene CMP process applied for a first time to superconductors. The demonstrated industrial reliability of damascene CMP processes on large scale semiconductor circuits is a major incentive for our research that should allow large numbers of nanometric Josephson junctions to be fabricated in both Nb and Al, the...