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A built-in angular sensing mechanism unique to the vibratory grating scanner is demonstrated through utilizing the zeroth-order beam, of which the intensity variation is affected by the angular position of the grating platform. With the first-order diffracted beam used for optical scanning, the stationary zeroth-order beam can be used for angular position sensing.
This paper demonstrates the design, fabrication and characterization of a micromachined electrostatic double-layered vibratory grating scanner for high speed, high optical resolution laser scanning applications. The prototype scanner with a 2mm diameter diffraction grating is capable of scanning a laser beam at around 21.591kHz with an optical scan angle of 33.5°, resulting a θopticalD product (product...
This paper presents an effective method to achieve synchronized laser scanning of multiple beams by using MEMS diffraction gratings with their resonant frequency fine tuning mechanisms. Multiple gratings are actuated in-plane by a common electrostatic comb-driven resonator and their resonant frequencies can be fine-tuned to compensate the micromachining process errors. Continuous and reversible resonant...
A novel micromachined electrostatic double-layered vibratory grating scanner has been successfully developed for high-speed high-resolution laser scanning applications. This paper presents its design, modeling, fabrication, and measurement results. A comprehensive dynamic model considering the geometric nonlinearity of the platform suspension flexures is also proposed to predict the dynamic performance...
A novel MEMS based in-plane vibratory sub-wavelength diffraction grating scanner is reported. Diffraction efficiency of more than 75%, optical scan angle of 13.7deg and scanning frequency of 20.35 kHz are experimentally achieved.
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