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This paper reports a fabrication process of a capacitive microelectromechanical system (MEMS) accelerometer with a highly symmetrical spring-mass structure for the high device performance, which is composed of eight springs and a central mass. The sandwich accelerometer is constituted by top layer, middle layer and bottom layer. The suspended spring-mass structure in the middle silicon layer is formed...
This paper reports a capacitive accelerometer structure with highly symmetrical eight springs and a mass. The accelerometer structure is formed simply by multilayer oxidation and wet etching (MOWE) technique, avoiding the generally adopted deep-groove photolithography when fabricating the thin spring. TMAH+Triton is selected as the etchant because it not only provides the minimum undercutting at the...
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