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The mechanisms of nanoscale fatigue of functionally graded TiN/TiNi films have been studied using multiple-loading cycle nanoindentation and nano-impact tests. The functionally graded films were sputter deposited onto silicon substrates, in which the TiNi film provides pseudo-elasticity and shape memory behaviour, while a top TiN surface layer provides tribological and anti-corrosion properties. Nanomechanical...