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Current portable particle detection instruments typically rely on optical methods which are limited to 100 nm diameter particles. Microfabricated bulk acoustic resonators, when used as mass balances, could take particle detection below this limit. This study examines the collection of particles onto piezoelectric bulk acoustic mode resonators from gaseous flow using classical impaction. Collection...
This paper reports micromachined piezoelectric-on-silicon bulk acoustic wave resonators operating at a nominal frequency of approximately 3.15 MHz in fluidic media. Electrical measurements of the open-loop response of the resonators when one of the resonator surfaces is submerged in water indicate high quality factors in the range of 110–190. These values of quality factor are at least an order of...
This paper presents the design and characterization of a piezoelectrically-transduced (AlN) on silicon micro-mechanical resonator operating in its lateral bulk acoustic width-extensional mode at 28.73 MHz. The equivalent m-BVD model of the resonator is extracted using a least-squares-error algorithm which is presented in this paper. We report a mechanical Q factor of 5970 and motional resistance Rx...
Microfabricated in-plane bulk acoustic resonators can be configured as gravimetric sensors wherein the mass of surface-bound species is transduced as a shift in the resonant frequency. Using this principle, we examine the adsorption of spherical polystyrene latex particles on the resonator surface by drying particulate laden droplets. Distribution of particles on the surface is governed by the coffee-ring...
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