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This paper reports a novel monolithic-integrated three-axis convective accelerometer by using a thermopile-embedded curving cantilever for Z-axis sensing. The cantilever down-curving is caused by pneumatic-effect of mutually stress-mismatched two layers. The convective accelerometer consists of a micro heater and several pairs of sensing thermopiles for 3-D temperature-difference detection. In Z-axis...
Abstract-This paper presents a novel composite sensor that is monolithically integrated with an accelerometer, a pressure sensor, and a thermometer by using a single-side-processed micromachining technique. Such composite sensors are highly demanded in tire pressure monitoring system (TPMS) applications. Based on heat convection, the accelerometer consists of a microheater and a pair of detector to...
Relative internal efficiency is an important economic index which reflects characteristics of flow passage equipments of turbine. This paper analyzed the concepts of relative internal efficiency and cylinder efficiency, and deduced relation-model for them. On the one hand, one new method was put forward to calculate relative internal efficiency. On the other hand, this model could also represent the...
The paper presents a novel single-side micromachined composite sensor, with a piezoresistive pressure sensor, a thermal-convection accelerometer and a thermometer monolithically integrated in one 2.5times2.5 mm2 chip, for low-cost production and applications such as tire-pressure monitoring systems (TPMS). The accelerometer is based on heat convection, including a micro heater and two pairs of micro...
Auxiliary steam, particularly shaft seal steam, is important for partial quantitative analysis of thermal system in power plant. The paper found that: whether at the steam or drain side of the regenerator, the recovering effect of shaft seal steam is equivalent to each other in calculation. Through mathematical derivation, this paper established the matrix for system utilization of shaft seal steam...
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